|
| |
|
FT-IR based gas analysis instruments, originally developed at
Advanced Fuel Research, Inc. (AFR) and its first spin-off company, On-Line
Technologies, Inc. (OLT), are now being sold by the MKS Instruments On-Line
Products Group. AFR customizes and re-sells the MKS On-Line gas analysis
products, primarily for combustion monitoring applications.
Products Include:
 |
Series 2030 MultiGas™ Analyzer
- Continuous Gas Analysis - Designed for
fast, continuous monitoring of multiple gas species, the MultiGas 2030
is ideal for use in a variety of applications, such as PFC stack
monitoring, ambient air analysis (industrial hygiene) and bulk gas
analysis. The MultiGas 2030 features ppb level sensitivity for many gas
species, a corrosion resistant gas cell which enables % to ppb detection
without a gas cell change, and a user-friendly software design which
enables simple calibration and operation. In addition, the ability of
the MultiGas 2030 to store permanent gas calibration spectra removes the
cost and need for gas cylinder use. |
|
Induct™ FTIR Gas Sensors - These are compact FTIR sensors that can
be easily integrated into any process for fault, monitoring, control or
end point determination. |
|
Process Sense Chamber Clean Endpoint Detector - A small low-cost
particle-pressure analyzers specifically designed to determine the
completion of plasma chamber cleaning for both semiconductor and flat
panel deposition chambers. |
AFR application notes include:
The U.S. Air Force's recognition of AFR's
MultiGas
Analysis capabilities.
The U.S. Department of Energy recognition of
AFR's Fourier Transform Infrared Products.
For additional information on these products, visit MKS On-Line Products™
website at:
http://www.mksinst.com
or contact Advanced Fuel Research, Inc.
|
|
